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Title:
PRODUCTION METHOD OF SILICON SINGLE CRYSTAL AND SILICON SINGLE CRYSTAL PRODUCED BY THE METHOD
Document Type and Number:
Japanese Patent JP2010076947
Kind Code:
A
Abstract:

To provide a production method of a silicon single crystal ingot, by which a dislocation-free silicon single crystal ingot having high qualities over the whole length can be grown even when the silicon single crystal ingot has a large diameter of 450 mm in the cylindrical part.

The silicon single crystal ingot 25 is grown by Czochralski process by rotating a quartz crucible 13 reserving a silicon melt 12 at a predetermined rotation speed and pulling the silicon single crystal ingot 25 from the silicon melt 12 while rotating the ingot at a predetermined rotation speed in the opposite direction to the quartz crucible 13. When the cylindrical part of the silicon single crystal ingot 25 is 450 mm, the average rotation speed of the silicon single crystal ingot 25 is set to 10 rpm, and the average rotation speed of the quartz crucible is set to 10 rpm.


Inventors:
KANDA TADASHI
Application Number:
JP2008244001A
Publication Date:
April 08, 2010
Filing Date:
September 24, 2008
Export Citation:
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Assignee:
SUMCO CORP
International Classes:
C30B29/06; C30B15/20
Attorney, Agent or Firm:
Masayoshi Suda