Title:
PRODUCTION OF MULTIDOT PATTERN HAVING DIFFRACTION GRATING AND APPARATUS FOR PRODUCING THE SAME
Document Type and Number:
Japanese Patent JP3203975
Kind Code:
B2
Abstract:
PURPOSE: To stably produce patterns at a high speed by making a rotating mechanism integral, simpler and smaller.
CONSTITUTION: This apparatus has a laser beam source 1 which generates a beam-shaped laser beam, an optical branching means 3 which branches the beam-shaped laser beam from the laser beam source 1 into a plurality of beams, an image rotating element 9 which is rotated by a rotary stage 8 at a prescribed angle to rotate at least a part of the laser beam branched by the optical branching means 3 to a desired position, an imaging element 12 which forms the interference fringes onto a photosensitive material 11 disposed on an X-Y stage 10 by condensing the laser beam rotated by this image rotating element 9 and a control means 13 which controls respectively the turning operation of the rotary stage 8 and the moving operation of the X-Y stage in accordance with the original data of the multidot patterns to be produced.
Inventors:
Susumu Takahashi
Application Number:
JP23163994A
Publication Date:
September 04, 2001
Filing Date:
September 27, 1994
Export Citation:
Assignee:
Toppan Printing Co., Ltd.
International Classes:
G02B5/18; G02B5/32; G02F1/13; G03H1/08; G03H1/26; (IPC1-7): G02B5/18; G02B5/32; G03H1/26
Domestic Patent References:
| JP675107A | ||||
| JP572405A | ||||
| JP572406A | ||||
| JP572407A | ||||
| JP2263589A |
Attorney, Agent or Firm:
Takehiko Suzue
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