To from a thin film excellent in heat resistance and optical property by heating a evaporating source under a helium atmosphere in a vacuum deposition device to sublime or evaporate an organic pigment housed therein to deposit on the surface of a substrate arranged at the upper part.
Gaseous helium supplied from a gas introducing line 5 is made into the plasma by impressing RF power through a coil 6 in a vacuum chamber 1 provided with a discharge valve 4 in an ion plating device 10. The organic pigment 15 housed in the evaporating source 110 arranged above the coil 6 and provided with a graphite made resistance heating boat 105 and a bumping preventing cap 111 is heated to a subliming or evaporating temp. under the helium plasma atmosphere. As a result, vaporized organic pigment collides with the plasma of gaseous helium in the chamber to activate the surface. The activated organic pigment is deposited on the substrate 101 for color filter above the evaporating source 111 heated to a prescribed temp. by the heater 102 to form an organic colored thin film.
TOMINAGA HIROSHI
KAKIMOTO NOBUO
MURAYAMA YOICHI
KASHIWAGI KUNIHIRO
JAPAN SCIENCE & TECH CORP
MURAYAMA YOICHI
KASHIWAGI KUNIHIRO