PURPOSE: To reduce surface resistance by press molding powder comprising In oxide and Sn oxide, then sintering at a given temperature and heat-treating the prepared sintered material in an oxygen-free atmosphere at a specific temperature.
CONSTITUTION: Indium de powder and Sn oxide powder are blended and ground so as to give 70-78wt.% In content and 4-12wt.% Sn content in the objective sintered material to prepare blended powder having ≤0.1μm average particle diameter. Then, the blended powder is press-molded in a mold under ≥1ton/cm2 and the molded article is sintered at ≤1,350-≤1,550°C for a given time. Then the sintered material is heat-treated in an oxygen-free atmosphere at 500-1,300°C to give a sintered material ITO having ≥80% relative density and low surface resistance. The mixed powder of the raw material is sintered at 500-1,300°C under ≥100kg/cm2 to similarly give the same sintered material of ITO.
TAKANASHI SHOJI
NATE TATSUO
