PURPOSE: To produce a stamper made of a metal harder than copper with high workability by peeling a non-metallic thin film from the 1st metallic thin film or a copper master disk and then removing the non-metallic thin film.
CONSTITUTION: The non-metallic thin film 12 is formed on the copper master disk 11 by a sputtering method or the like, the 1st metal 13 is formed on the thin film 12 using a dielectric substance such as SiO2 by the sputtering method or the like and the 2nd metal 14 is plated by using the 1st metal 13 as an electrode. The thin film 12 is peeled from the 11 or the thin film 13 to form the stamper. Since the non-metal is not easily joined with metals, the non-metal can easily be peeled from the metals and the stamper formed by a metal harder than the copper master disk can easily be peeled from the master disk.
UENO FUMIAKI
KISHI TOSHINORI
OGAWA HIROYUKI
