PRODUCTION SYSTEM OF SEMICONDUCTOR DEVICE

Title:

PRODUCTION SYSTEM OF SEMICONDUCTOR DEVICE

Document Type and Number:

Japanese Patent JP2003086480

Kind Code:

A

Abstract:

To provide a production system of a semiconductor device which has a simple structure, accurate operations and high productivity.

In this production system of a semiconductor device, a base holder 33, on which bases 40, 41 are mounted, is linearly moved along a linear rail 58, and the movement of the base 40 from the rail 58 to a process treatment apparatus 51 and the movement of the base 41 from the apparatus 51 to the holder 33 can be performed, by using one-dimensional arms 61 and 66. Accordingly, the production system of a semiconductor device can be achieved which has the simple structure, the accurate operations and high productivity.

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Inventors:

TAKEGAWA HIROSHI
TATSUKE HIROSHI
YOSHIDA TOMOHIKO

Application Number:

JP2001273521A

Publication Date:

March 20, 2003

Filing Date:

September 10, 2001

Export Citation:

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Assignee:

SHARP KK

International Classes:

H01L21/50; H01L21/02; (IPC1-7): H01L21/02; H01L21/50

Attorney, Agent or Firm:

Aoyama Ryo (1 person outside)

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