Title:
PRODUCTION OF THIN-FILM TRANSISTOR ARRAY SUBSTRATE
Document Type and Number:
Japanese Patent JPH04273215
Kind Code:
A
Abstract:
PURPOSE:To substantially prevent the generation of the disconnection of drain electrodes and to improve the orientation characteristics of a liquid crystal in the production of the TFT array substrate. CONSTITUTION:A metallic layer 2 consisting of Ta alloy contg. Ta is formed on an insulating substrate 1 and a mask M having heat resistance is formed in the prescribed position thereon and is heated, by which the Ta of the part not coated with the mask M of the metallic layer 2 is oxidized to form an insulating layer 3. The mask M is then removed and the Ta of the metallic layer 2 under this mask M is anodized to form the insulating layer 3. The level difference formed by the constitution on the substrate 1 is decreased according to such procedures. The disconnection of the electrodes is substantially prevented and the orientation characteristics of the liquid crystal are improved.
Inventors:
YOSHIDA MAMORU
KOIZUMI MASUMI
WATANABE NOBUAKI
SHIMIZU MARI
KOIZUMI MASUMI
WATANABE NOBUAKI
SHIMIZU MARI
Application Number:
JP3406191A
Publication Date:
September 29, 1992
Filing Date:
February 28, 1991
Export Citation:
Assignee:
OKI ELECTRIC IND CO LTD
International Classes:
G02F1/1343; G02F1/136; G02F1/1368; H01L21/336; H01L29/786; (IPC1-7): G02F1/1343; G02F1/136
Attorney, Agent or Firm:
Maeda Minoru
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