Title:
PRODUCTION OF THIN FILMLIKE DIAMOND
Document Type and Number:
Japanese Patent JPH06116088
Kind Code:
A
Abstract:
PURPOSE: To obtain a thin filmlike diamond composed of coarse diamond crystals with few crystal boundaries by forming fine recesses and protrusions in the surface of a substrate, subjecting the substrate to surface scribing as pretreatment and carrying out vapor phase synthesis of thin filmlike diamond.
CONSTITUTION: Fine ruggedness is formed in the surface of a substrate to 1-2μm roughness by anisotropic etching and the substrate is subjected to surface scribing as pretreatment by ultrasonic cleaning in alcohol contg. suspended fine diamond particles. Vapor phase synthesis of thin filmlike diamond is then carried out on the surface of the substrate.
Inventors:
UENISHI SHIGERU
TANAKA JUNICHI
MATSUNAGA HIRONORI
KOBA MASAYOSHI
TANAKA JUNICHI
MATSUNAGA HIRONORI
KOBA MASAYOSHI
Application Number:
JP26345992A
Publication Date:
April 26, 1994
Filing Date:
October 01, 1992
Export Citation:
Assignee:
SHARP KK
International Classes:
C30B29/04; (IPC1-7): C30B29/04
Attorney, Agent or Firm:
Aoyama Ryo (1 person outside)
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