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Title:
PRODUCTION OF THIN SUPERCONDUCTING FILM
Document Type and Number:
Japanese Patent JPH0243358
Kind Code:
A
Abstract:

PURPOSE: To easily produce the thin superconducting film having the high critical temp. by using Cu, Cr, Ca metals and Bi2O3 as evaporating sources at the time of forming a Bi-Sr-Ca-Cu oxide having a specific compsn. as a thin film by a vacuum vapor deposition device.

CONSTITUTION: The Bi2O3 is used together with the Cu, Sr, Ca metals as the evaporating sources at the time of forming the oxide having the compsn. expressed by the formula consisting of Bix(Sr1-xCax)bCu1-a-bOy where a: 0.2-0.35, b: 0.4-0.5, x: 0.3-0.7, y: 0.8-1.2 as the thin film by using the vacuum vapor deposition device. The temp. of the substrate on which the thin film is to be formed is preferably set at about 800-900°C. The thin superconducting film consisting of the Bi-Sr-Ca-Cu oxide having the high critical temp. is easily formed in this way.


Inventors:
YOSHITAKE TSUTOMU
SATO TETSURO
FUJITA JUNICHI
MIURA SADAHIKO
KUBO YOSHIMI
IGARASHI HITOSHI
Application Number:
JP19150288A
Publication Date:
February 13, 1990
Filing Date:
July 29, 1988
Export Citation:
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Assignee:
NEC CORP
International Classes:
C04B41/87; C01G1/00; C01G29/00; C23C14/08; C23C14/24; C30B29/22; (IPC1-7): C01G29/00; C04B41/87; C23C14/08; C23C14/24; C30B29/22
Attorney, Agent or Firm:
Uchihara Shin



 
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