Title:
PRODUCTION OF TUNING FORK TYPE CRYSTAL VIBRATOR
Document Type and Number:
Japanese Patent JP3229005
Kind Code:
B2
Abstract:
PURPOSE: To reduce a frequency change against an external impressed pressure and shock by selecting a ratio of a fork width to a remained etching size of the tuning fork type crystal vibrator to be a specific range.
CONSTITUTION: A vibration chip consists of two arms 3 (the length is L and the width is W) and a fork 4 (the width is D) removed by the etching processing is in existence between.the two arms 3. A tip of the fork 4 is a circular arc tangent to the width D. Remained etching is caused by the etching processing by using a mask of the tuning fork shape as above. Let the remained etching in the broadwise direction of the tuning fork be S and the remained etching in the lengthwise direction of the tuning fork be H, then a change in the oscillating frequency due to an externally impressed pressure and shock is less by controlling the etching time in a way that a ratio D/H of the tuning fork width D to the remained etching size H caused by the etching processing is selected to be 6-14.
Inventors:
Fumio Kimura
Application Number:
JP11051592A
Publication Date:
November 12, 2001
Filing Date:
April 28, 1992
Export Citation:
Assignee:
Seiko Instruments Inc.
International Classes:
H03H3/02; H03H9/215; (IPC1-7): H03H9/215; H03H3/02
Domestic Patent References:
| JP54151391A | ||||
| JP57199314A | ||||
| JP5983412A | ||||
| JP2150108A | ||||
| JP1290307A | ||||
| JP239886B2 |
Attorney, Agent or Firm:
Masaaki Sakaue
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