Title:
PROFILE IRREGULARITY MEASURING DEVICE
Document Type and Number:
Japanese Patent JP3295993
Kind Code:
B2
Abstract:
PURPOSE: To attain high precision and miniaturize a device by emitting the outgoing light flux from a semiconductor laser via a solid light transmission line, and utilizing it as the measuring light flux and the reference light flux.
CONSTITUTION: The outgoing light from a semiconductor laser light source 1 is directly fed to a single-mode optical fiber 3 with a lens 2, and it is sent out from an outgoing end face. The outgoing wave front is equal to the diffracted wave by a pinhole having the same size as the diameter of the core 3a of the fiber 3, and part of the outgoing light radiates a measurement face 4 as the measuring light flux. The light flux reflected on the measurement face 4 is again condensed on the outgoing end face of the fiber 3, it is reflected on a clad section 3b, and it is formed into the parallel light flux by a lens 5 and guided to the light receiving face of a CCD 6. The other part of the outgoing light from the fiber 3 is formed into the parallel light as the reference light flux by the lens 5, it is made to interfere with the measuring light flux by the CCD 6, and interference fringes are generated. The outgoing wave front is the nearly ideal spherical wave, and the profile irregularity can be measured with high precision at 1/100-1/1000 of the light wavelength λ.
Inventors:
Takashi Genma
Application Number:
JP34359992A
Publication Date:
June 24, 2002
Filing Date:
December 01, 1992
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G01B9/02; G01B11/24; G01B11/255; (IPC1-7): G01B11/24; G01B9/02; G01B11/255
Domestic Patent References:
| JP2228505A | ||||
| JP61120037A |