Title:
マイクロリソグラフィ投影露光装置の投影対物レンズ
Document Type and Number:
Japanese Patent JP2009521000
Kind Code:
A
Abstract:
The objective (100) produces an intermediate image (IMI) and comprises an optical subsystem (130) on an image-plane side that projects the IMI into an image-plane (IP) with an image-plane side projection ratio. The ratio has an absolute value of 0.3. An independent claim is included for micro-structured component manufacturing method.
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Inventors:
Beder, Susan
Kramer, daniel
Feltman, Heiko
Kramer, daniel
Feltman, Heiko
Application Number:
JP2008546355A
Publication Date:
May 28, 2009
Filing Date:
December 07, 2006
Export Citation:
Assignee:
Carl Zeiss SMT AG
International Classes:
G02B13/00; G02B13/24; G02B13/18; H01L21/027
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda
Fumiaki Otsuka
Takaki Nishijima
Hiroyuki Suda