Title:
PROJECTION OPTICAL SYSTEM
Document Type and Number:
Japanese Patent JP3823436
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a projection optical system constituted so that partial chromatic aberration and the other monochromatic aberration can be compatibly corrected by including a first lens group having positive power, a second lens group having negative power and a third lens group having the positive power and satisfying a specified condition.
SOLUTION: This projection optical system is constituted by using at least two kinds of glass materials being the fluorite and the quartz and including the first lens group G1 having the positive power, the second lens group G2 having the negative power and the third lens group G3 having the positive power in turn from an object side. Besides, it is constituted so as to satisfy the conditions of &verbar L/f&verbar <2 and 0.7≤f3/f3C≤2.8. Where, L shows a distance to an image surface from an object surface, (f) shows the focal distance of the whole system, (f3) shows the focal distance of the group G3 and (f3C) shows a synthetic focal distance only by a fluorite lens element. Thus, since the spectral width of a laser light source for exposure is provided with a margin, throughput is enhanced.
Inventors:
Shintaro Kudo
Application Number:
JP10250497A
Publication Date:
September 20, 2006
Filing Date:
April 03, 1997
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B13/24; G02B9/12; G02B13/00; G03F7/20; H01L21/027; (IPC1-7): G02B13/24; G03F7/20; H01L21/027
Domestic Patent References:
| JP60178423A | ||||
| JP63121810A | ||||
| JP61090115A | ||||
| JP10197791A | ||||
| JP6242379A |
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