Title:
投影光学系、露光装置、および露光方法
Document Type and Number:
Japanese Patent JP4779394
Kind Code:
B2
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Inventors:
Kumazawa Masato
Application Number:
JP2005083634A
Publication Date:
September 28, 2011
Filing Date:
March 23, 2005
Export Citation:
Assignee:
NIKON CORPORATION
International Classes:
G02B13/24; G02B13/18; G03F7/20; H01L21/027
Domestic Patent References:
| JP2002208549A | ||||
| JP2000131607A | ||||
| JP2000199850A | ||||
| JP2003202494A | ||||
| JP2000171707A | ||||
| JP2004086110A |
Attorney, Agent or Firm:
Takao Yamaguchi