Title:
投影光学系および投影装置
Document Type and Number:
Japanese Patent JP5257904
Kind Code:
B2
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Inventors:
Tatsuo Uchida
Toru Kawakami
Tetsuya Abe
Toru Kawakami
Tetsuya Abe
Application Number:
JP2010500749A
Publication Date:
August 07, 2013
Filing Date:
February 26, 2009
Export Citation:
Assignee:
Tohoku University
International Classes:
G02B17/08; G02B13/18; G03B21/10; G03B21/14
Domestic Patent References:
| JP2005084576A | 2005-03-31 | |||
| JP2005084576A | 2005-03-31 |
Attorney, Agent or Firm:
Shuhei Matsuoka
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