Title:
Projector style
Document Type and Number:
Japanese Patent JP6025835
Kind Code:
B2
Abstract:
A projection arrangement for imaging lithographic structure information comprises: an optical element, which has at least partly a coating composed of an electrically conductive layer material. The coating comprises a continuous region, which has no elements that shade projection light. In this case, the layer material and/or the optical element change(s) an optical property, in particular a refractive index or an optical path length, depending on a temperature change. At least one mechanism for coupling energy into the layer material is provided, which couples in energy in such a way that the layer material converts coupled-in energy into thermal energy. The layer material may comprise graphene, chromium and/or molybdenum sulfide (MoS2).
Inventors:
Rolf Flyman
Boris Bitner
Boris Bitner
Application Number:
JP2014516308A
Publication Date:
November 16, 2016
Filing Date:
June 19, 2012
Export Citation:
Assignee:
Carl Zeiss SGM Gaehha
International Classes:
G02B19/00; G03F7/20
Domestic Patent References:
| JP2010504631A | ||||
| JP2013536988A | ||||
| JP2011109088A | ||||
| JP2004031952A | ||||
| JP2009295976A | ||||
| JP2010502027A | ||||
| JP2010517279A | ||||
| JP2001196305A | ||||
| JP2001185483A | ||||
| JP2011063506A | ||||
| JP2008118135A |
Foreign References:
| US6521877 |
Attorney, Agent or Firm:
Kenji Sugimura
Hitomi Yuki
Hitomi Yuki
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