Title:
性状測定装置及び性状測定方法
Document Type and Number:
Japanese Patent JP6966858
Kind Code:
B2
Abstract:
To provide a property measurement device with which it is possible to measure the properties of a fluid present on a substrate surface without being affected by the properties of a substrate.SOLUTION: Provided is a property measurement device for measuring-computing the properties of a fluid supplied to the surface of a substrate W to form a fluid film 51 on the surface of the substrate W. The property measurement device comprises: a laser oscillator 4 for radiating a laser beam L in a direction along the surface of the substrate W so as to pass through the fluid film 51 from a side of the substrate W; a photodetector 5 for detecting scattered light R derived from the laser beam L having passed through the fluid film 51 by being scattered upward of the surface of the substrate W by the fluid film 51; and a measurement-computation unit 6 for measuring-computing the properties of the fluid film on the basis of the scattered light R detected by the photodetector 5.SELECTED DRAWING: Figure 2
Inventors:
Shin Tachibana
Satoshi Hiraki
Motonobu Shiomi
Satoshi Hiraki
Motonobu Shiomi
Application Number:
JP2017066834A
Publication Date:
November 17, 2021
Filing Date:
March 30, 2017
Export Citation:
Assignee:
Kurashiki Spinning Co., Ltd.
International Classes:
G01N21/49; G01B11/06; G01N21/65; H01L21/66
Domestic Patent References:
| JP1195346A | ||||
| JP2016070669A | ||||
| JP2005189029A | ||||
| JP61137048A | ||||
| JP2016532128A | ||||
| JP59054936A |
Foreign References:
| CN104374743A | ||||
| US20110157586 | ||||
| US20160061695 |
Attorney, Agent or Firm:
Suzuki Kazuaki
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