Title:
PROTECTION MATERIAL
Document Type and Number:
Japanese Patent JP2010132835
Kind Code:
A
Abstract:
To provide a protection material sufficiently achieving protection at wet etching and capable of easily performing removal from a surface to be protected.
The protection material 2A capable of being applied to protection of a surface of a base plate 1A when the wet etching is performed has: a protection member 2; and an adhesion layer 3 provided on one surface of the protection member 2 and sticking the protection member 2 onto a surface of the base plate 1A. In the adhesion layer 3, an unvulcanized polyolefin dissolvable in an organic solvent such as decalin is used, for example, as a formation material.
COPYRIGHT: (C)2010,JPO&INPIT
Inventors:
MIYAGAWA TAKUYA
Application Number:
JP2008312352A
Publication Date:
June 17, 2010
Filing Date:
December 08, 2008
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
C09J7/02; C09J123/00; C09J151/00; C09J153/00; H01L21/306
Attorney, Agent or Firm:
Kazuya Nishi
Masatake Shiga
Kazunori Onami
Masatake Shiga
Kazunori Onami
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