Title:
PROTECTIVE FILM AND PROCESS FOR MANUFACTURING THE SAME
Document Type and Number:
Japanese Patent JP3437952
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a protective film having a high quality for dry film resists.
SOLUTION: The protective film uses a polyethylene film obtained by either a process of pressurizing ethylene with an ultra-high pressure compressor, then polymerizing the ethylene at a reaction temperature of 190°C-300°C and under a reaction pressure of 167 MPa or higher in the presence of a radical- polymerization initiator, or a process of pressurizing ethylene with an ultra-high pressure compressor, then polymerizing the ethylene at a reaction temperature of 190°C-300°C in the presence of a radical polymerization initiator and also in the coexistence of the radical-polymerization inhibitor in the reaction system.
Inventors:
Katsuaki Tsutsumi
Isao Hashimoto
Isao Hashimoto
Application Number:
JP2000248447A
Publication Date:
August 18, 2003
Filing Date:
August 18, 2000
Export Citation:
Assignee:
Japan Polyolefin Co., Ltd.
International Classes:
G03F7/004; B32B27/32; C08F2/01; C08F2/38; C08F2/42; C08F10/02; C08J5/18; G03C1/053; G03F7/11; (IPC1-7): G03F7/11; G03F7/004
Domestic Patent References:
| JP11286522A | ||||
| JP52119694A | ||||
| JP4010987B1 |
Attorney, Agent or Firm:
Takehiko Saito (1 outside)
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