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Title:
PROTECTIVE MEMBER AND METHOD FOR STICKING PROTECTIVE TAPE
Document Type and Number:
Japanese Patent JP2013247171
Kind Code:
A
Abstract:

To provide a protective member that allows an annular adhesive layer with protective tape laid thereon to be reliably stuck on a peripheral portion of a wafer, and to provide a method for sticking the protective tape.

A protective member is provided for sticking, on a wafer, protective tape that has: a diameter corresponding to a diameter of the wafer; and an annular surface adhesive layer provided only in a peripheral portion thereof corresponding to a peripheral portion of the wafer. The protective tape has formed thereon a mark indicating the center thereof. A transparent or translucent sheet is provided that has a larger area than the protective tape and on a surface of which an adhesive layer with weaker adhesive power than that of the annular adhesive layer of the protective tape is laid. A rear side of the protective tape is stuck on the surface of the sheet.


Inventors:
KITAMURA HIROSHI
Application Number:
JP2012118228A
Publication Date:
December 09, 2013
Filing Date:
May 24, 2012
Export Citation:
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Assignee:
DISCO ABRASIVE SYSTEMS LTD
International Classes:
H01L21/683; H01L21/304
Domestic Patent References:
JP2006344932A2006-12-21
JP2005019841A2005-01-20
JP2009253081A2009-10-29
JP2005123568A2005-05-12
Attorney, Agent or Firm:
Naozumi Ono
Sachiko Okunuki