Title:
機構の不安定性の自己補償が行われる近接センサ
Document Type and Number:
Japanese Patent JP4394067
Kind Code:
B2
Abstract:
A retractable proximity sensor system with a self-compensating mechanism to reduce the impact of mechanical instability on the precision of a proximity sensor is disclosed. The retractable proximity sensor system includes a retractable proximity sensor and a proximity sensor housing in which the housing includes a reference plate that is either integral or affixed to the housing. The proximity sensor precisely detects very small distances between a measurement probe and a work surface, such as, for example, a semiconductor wafer. A method is provided for extending and retracting a proximity sensor and compensating for the drift associated with the mechanical instability of a proximity sensor head to improve precision.
Inventors:
Peter Kotcher Spager
Application Number:
JP2005366314A
Publication Date:
January 06, 2010
Filing Date:
December 20, 2005
Export Citation:
Assignee:
AS ML Holding N.V.
International Classes:
G01B13/12; G01B13/08
Domestic Patent References:
| JP2005338074A | ||||
| JP2232507A | ||||
| JP50055465U |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki