Title:
PULLING UP OF SINGLE CRYSTAL
Document Type and Number:
Japanese Patent JP3132412
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a method for pulling up a sound and homogeneous single crystal in a good yield at higher speed.
SOLUTION: Another coil 12 coaxial with a pulling up axis is arranged above the surface of a melt liquid 4 and a magnetic field in the opposite direction is generated to thereby reduce the distribution of the intensity of the vertical magnetic field at the surface of the melt liquid 4 from that near the interface of the solid and liquid of the melt 4 near the center of a crucible 1a and increase the intensity from that on the periphery of the crucible wall in an apparatus for producing a single crystal by the Czochralski (CZ) process for making the magnetization direction of a coil 6 for generating the magnetic field coincide with the central shaft and applying the magnetic field in the vertical direction.
Inventors:
Hiroshi Morita
Application Number:
JP8821897A
Publication Date:
February 05, 2001
Filing Date:
April 07, 1997
Export Citation:
Assignee:
SUMITOMO METAL INDUSTRIES,LTD.
International Classes:
C30B15/00; C30B29/06; C30B30/04; (IPC1-7): C30B15/00; C30B29/06; C30B30/04
Domestic Patent References:
| JP10279380A | ||||
| JP10273392A | ||||
| JP10279395A | ||||
| JP10279394A | ||||
| JP6442385A |
Attorney, Agent or Firm:
Morio Mori (1 outside)