PURPOSE: To prevent metallic corrosion in a pulse laser system, by preventing corona discharge, accompanied with ozone, between an insulator of a current lead-in terminal and a metallic member near to this insulator, such as a current lead-in pole or a holder for the lead-in terminal, during the previous ionization for a space of a main discharge electrode.
CONSTITUTION: A small space 8 between a current lead-in pole 1 and a ceramics 4 as an insulator or a small space 10 between a current lead-in terminal holder 7 and the ceramics 4 is enclosed with an elastic resin 9 to shut the space from an atmosphere. Then, metallic corrosion caused by ozone is prevented, because ozone is not produced without oxygen from the atmosphere even when corona discharge is generated between the current lead-in pole 1 and the ceramics 4 or the current lead-in terminal holder 7 and the ceramics 4. In addition, the spaces 8 or 10 may be filled with a resin.
| JPS59117184 | LASER DEVICE |
WAKABAYASHI OSAMU
MIZOGUCHI KAZU
