Title:
PUMP CONTROL UNIT FOR DRY VACUUM PUMP, AND DRY VACUUM PUMP DEVICE
Document Type and Number:
Japanese Patent JP2019031924
Kind Code:
A
Abstract:
To provide a dry pump vacuum device capable of reducing adverse effect that a control unit incurs from a high-temperature pump body.SOLUTION: A dry vacuum pump device 100 has a pump body unit 32 and a pump control unit 36. The pump body unit 32 has a dry vacuum pump 28, and a motor 30 configured to drive the dry vacuum pump 28. The pump control unit 36 is provided independently of the pump body unit 32. The pump control unit 36 can be connected to the pump body unit 32 by a power cable 34 for supplying power to the motor 30, and is configured to control power supplied to the motor 30.SELECTED DRAWING: Figure 2
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Inventors:
IWASAKI KOICHI
Application Number:
JP2017152466A
Publication Date:
February 28, 2019
Filing Date:
August 07, 2017
Export Citation:
Assignee:
EBARA CORP
International Classes:
F04B37/16
Domestic Patent References:
| JP2014152650A | 2014-08-25 | |||
| JP2007092582A | 2007-04-12 |
Attorney, Agent or Firm:
Shinjiro Ono
Toru Miyamae
Yukio Kanegae
Koichi Kushida
Makoto Watanabe
Toru Miyamae
Yukio Kanegae
Koichi Kushida
Makoto Watanabe