Title:
PUMP FOR SEMICONDUCTOR MANUFACTURING DEVICE
Document Type and Number:
Japanese Patent JP3931048
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To suppress occurrence of pulsation to continuously and smoothly circulate and transport liquid and to substantially reduce installing space.
SOLUTION: Bellows 7 and 18 are provided so as to mutually face each other inside casings 6 and 17 fixed and connected to both side parts of a partition wall 1 provided with a liquid inflow passage 2 and an outflow passage 3. The one bellows 7 is provided so as to expand and contract via an air cylinder part 14 for composing a reciprocating pump part 4. A liquid chamber 20a capable of temporarily storing liquid discharged from the pump part 4 and an air chamber 20b sealed with gas are formed in the other bellows 17 side to absorb pulsation caused by discharge pressure of the liquid discharged from a pump acting chamber 9a of the pump part 4.
Inventors:
Kiyoshi Nishio
Ryo Imanishi
Mutsumi Fujii
Yoji Minato
Ryo Imanishi
Mutsumi Fujii
Yoji Minato
Application Number:
JP2001135971A
Publication Date:
June 13, 2007
Filing Date:
January 10, 1997
Export Citation:
Assignee:
Nippon Pillar Industry Co., Ltd.
International Classes:
F04B13/00; F04B53/00; F04B9/103; F04B9/107; F04B9/115; F04B43/02; F04B43/06; F04B43/08; F04B43/10; F04B53/10; (IPC1-7): F04B13/00; F04B9/103; F04B9/107; F04B9/115; F04B43/02; F04B43/06; F04B43/08; F04B43/10; F04B53/00; F04B53/10
Domestic Patent References:
| JP6047675U | ||||
| JP3149372A | ||||
| JP8159016A | ||||
| JP5240161A | ||||
| JP8121342A |
Attorney, Agent or Firm:
Koichi Suzue
Shoji Suzue
Shoji Suzue
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