Title:
PURGE SYSTEM AND PURGE JOINT
Document Type and Number:
Japanese Patent JP3208062
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To obtain a purge system generating no particles and capable of efficiently performing purging within a short time by providing the system with a purge arranged on a purge gas piping route and having an opening part communicating with the outside at the connection position of two pipes.
SOLUTION: An external opening 14C is formed at the connection position of pipes 12A, 12B, that is, at the gap position of both of them and connected to the external opening 18a formed to the central part of an external joint 18. A male screw is formed to the outer periphery of the external joint 18 and the pipes 12A, 12B are brought to a contact state so as to hold a gasket 19 and a nut member 13 is screwed in a joint body 14. By this constitution, since purging can be performed in a usual piping state, connection machinery can be detached rapidly and simply. When the pipes are connected or disconnected, purging due to inert gas is performed and, therefore, an excessive time for purging can be conserved to a large extent.
Inventors:
Kenichi Goto
Yoshihisa Sudo
Yoshihisa Sudo
Application Number:
JP18431996A
Publication Date:
September 10, 2001
Filing Date:
July 15, 1996
Export Citation:
Assignee:
CKD Corporation
International Classes:
B01J4/00; B08B9/032; C23C16/44; F16L19/02; F17C13/04; F17D1/02; F16L19/00; H01L21/205; H01L21/31; (IPC1-7): B01J4/00; F17D1/02
Domestic Patent References:
| JP84999A | ||||
| JP6281052A |
Attorney, Agent or Firm:
Takashi Tomizawa (2 outside)
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