PURPOSE: To carry out purification and produce a liquid capable of being heated with scarcely generating HF, excellent in stability, safety, etc., and useful as, e.g. a liquid for electronic components by bringing a fluorine-based inactive liquid into contact with water or an aqueous alkali solution in the presence of silica, alumina or a silicate at a specified temperature.

CONSTITUTION: This purification is carried out by bringing (A) a fluorine-based inactive liquid such as a perfluoro-tert-amine into contact with (C) water or an aqueous alkali solution in the presence of (B) silica such as diatomaceous earth, alumina or a silicate such as allophane at 0 to 100°C to obtain the objective liquid. In addition, the component (B) is used preferably in an amount of 0.1 to 30 pts.wt., especially l to 20 pts.wt. based on 100 pts.wt. (A). The component (C) has 0.1 to 50wt.%, especially 2 to 20wt.% alkali concentration and the amount of used component (C) is 0.1 to 10 time the weight of the component (A).