Title:
PURIFICATION OF ORGANOMETALLIC COMPOUND
Document Type and Number:
Japanese Patent JP2007137883
Kind Code:
A
Abstract:
To provide a method for purifying an organometallic compound in respect to field of purification of the organometallic compound, particularly a material used in the vapor deposition of metal-containing films.
The present invention provides a method for purifying the organometallic compound by heating the organometallic compound in the presence of a trialkyl aluminum compound and a catalyst.
Inventors:
SHENAI-KHATKHATE DEODATTA V
DICARLO RONALD L JR
DICARLO RONALD L JR
Application Number:
JP2006311645A
Publication Date:
June 07, 2007
Filing Date:
November 17, 2006
Export Citation:
Assignee:
ROHM & HAAS ELECT MAT
International Classes:
C07C241/02; C07C243/14; C07C391/00; C07C395/00; C07F3/06; C07F5/00; C07F5/02; C07F5/06; C07F7/00; C07F7/10; C07F7/30; C07F9/50; C07F9/68; C07F9/72; C07F9/90; C07F9/94
Domestic Patent References:
| JPH07224071A | 1995-08-22 | |||
| JPH0859673A | 1996-03-05 |
Attorney, Agent or Firm:
Minoru Kondo
Koji Hashimoto
Koji Hashimoto
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