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Patent Searching and Data


Title:
PURIFYING MATERIAL FOR REMOVING MOISTURE IN NITRIC OXIDE GAS AND NITRIC OXIDE GAS PURIFIER
Document Type and Number:
Japanese Patent JP2005111434
Kind Code:
A
Abstract:

To dissolve the problem that, although it is required to remove moisture from nitric oxide necessary in semiconductor production, or the like, a nitric oxide gas purifying material which does not advance disproportionation and decomposition reaction of nitric oxide gas and does not increase impurities, is not known.

The nitric oxide gas purifying material for removing minute amount of moisture contained in the nitric oxide gas by chemical adsorption is produced by depositing anhydrous aluminum fluoride on a surface of an inactive supporting body. Further, a purifier using the nitric oxide gas purifying material is also provided.


Inventors:
OYASHIKI YASUSHI
Application Number:
JP2003351975A
Publication Date:
April 28, 2005
Filing Date:
October 10, 2003
Export Citation:
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Assignee:
MYKROLIS CORP
International Classes:
B01D53/28; B01J20/02; C01B21/24; (IPC1-7): B01D53/28; B01J20/02; C01B21/24
Attorney, Agent or Firm:
Motohiro Kurauchi
Hiroshi Kazama