Title:
製造工程の監視のための水晶振動子マイクロバランスセンサ及びそれに関連する方法
Document Type and Number:
Japanese Patent JP7237934
Kind Code:
B2
Abstract:
A monitoring device for monitoring a fabrication process in a fabrication system. The monitored fabrication system includes a process chamber and a plurality of flow components. A quartz crystal microbalance (QCM) sensor monitors one flow component of the plurality of flow components of the fabrication system and is configured for exposure to a process chemistry in the one flow component during the fabrication process. A controller measures resonance frequency shifts of the QCM sensor due to interactions between the QCM sensor and the process chemistry in the one flow component during the fabrication process. The controller determines a parameter of the fabrication process in the process chamber as a function of the measured resonance frequency shifts of the QCM sensor within the one flow component.
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Inventors:
Rinzan Mohammed Bukhari
Song Chun-hwa
lakeman steve james
Song Chun-hwa
lakeman steve james
Application Number:
JP2020511512A
Publication Date:
March 13, 2023
Filing Date:
August 24, 2018
Export Citation:
Assignee:
INFICON Inc.
International Classes:
G01N5/02; G01M3/24; G01N29/12
Domestic Patent References:
| JP2009098133A |
Foreign References:
| US6295861 |
Attorney, Agent or Firm:
Patent Attorney Corporation Lexto International Patent Office