Title:
ラジアルパワーメガソニックトランスデュサー
Document Type and Number:
Japanese Patent JP4156520
Kind Code:
B2
Abstract:
A transducer comprising an acoustic energy generating means and a resonator. The acoustic energy generating means generates acoustic energy and is adapted for delivering an approximately uniform amount of acoustic energy to each unit of surface area on a substrate in a given time period when the substrate is rotating. The acoustic energy generating means has a surface area that is less than the surface area of the substrate, and may comprise two or more piezoelectric crystal segments that are separately controllable with respect to power and/or time. When assembled, the two more piezoelectric crystal segments give the acoustic energy generating means a rectangular shape, a wedge shape or a triangle shape. The resonator is attached to the acoustic energy generating means for transmitting the acoustic energy to the substrate.
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Inventors:
Beck, Mark Jay
Benner Beck, Richard Bee
Lillard, Raymond Wye
Leebshire, Eric Gee
Benner Beck, Richard Bee
Lillard, Raymond Wye
Leebshire, Eric Gee
Application Number:
JP2003548584A
Publication Date:
September 24, 2008
Filing Date:
November 01, 2002
Export Citation:
Assignee:
Product Systems Incorporated
International Classes:
B08B3/12; H01L21/304; G10K11/32; H01L25/00; H04R1/34; H04R23/00
Domestic Patent References:
| JP2000508237A |
Attorney, Agent or Firm:
Takehiko Suzue
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto
Satoshi Kono
Makoto Nakamura
Kurata Masatoshi
Takashi Mine
Yoshihiro Fukuhara
Sadao Muramatsu
Ryo Hashimoto