Title:
放射発生デバイス、リソグラフィ装置、デバイス製造方法、およびその方法により製造されたデバイス
Document Type and Number:
Japanese Patent JP4917670
Kind Code:
B2
Abstract:
A device constructed to generate radiation includes a liquid bath, and a pair of electrodes. At least a part of one of the electrodes is formed by a cable part moveable with respect to the liquid bath. The device also includes an actuator arranged to move the cable part from a liquid-adhering position to an ignition position, and an ignition source configured to trigger a discharge produced radiating plasma from the liquid adherent to the cable part, when the cable part is in the ignition position, by a discharge between the electrodes. The liquid-adhering position is a position for adhering a liquid from the bath to the part of the electrode.
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Inventors:
Sur, Wouter, Anton
Van Harpen, Marten, Marinus, Johannes, Wilhelms
Van Harpen, Marten, Marinus, Johannes, Wilhelms
Application Number:
JP2010507343A
Publication Date:
April 18, 2012
Filing Date:
April 28, 2008
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
H01L21/027; G03F7/20; H05G2/00
Domestic Patent References:
| JP2008294393A | 2008-12-04 | |||
| JPS5748431A | 1982-03-19 | |||
| JP2000317737A | 2000-11-21 |
Foreign References:
| WO2000019496A1 | 2000-04-06 | |||
| WO2008029327A2 | 2008-03-13 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki