Title:
感放射線性組成物
Document Type and Number:
Japanese Patent JP5664652
Kind Code:
B2
Abstract:
A radiation-sensitive composition includes a photoacid generator represented by a general formula (1), and a solvent. Each R0 independently represents a hydrogen atom, a fluorine atom, or a substituted or unsubstituted monovalent organic group. R1 represents a fluorine atom or a substituted or unsubstituted monovalent organic group. R2 represents a fluorine atom or a substituted or unsubstituted monovalent organic group. Rf represents a fluoromethylene group or a divalent fluoroalkylene group. M+ represents a monovalent onium cation. Optionally R1 bonds to Rf or R2 to form a cyclic structure.
Inventors:
丸山 研
Application Number:
JP2012529528A
Publication Date:
February 04, 2015
Filing Date:
July 20, 2011
Export Citation:
Assignee:
ＪＳＲ株式会社
International Classes:
G03F7/004; C07C309/06; C07C309/25; C07C381/12; G03F7/039
Domestic Patent References:
| JP2003327572A | 2003-11-19 | |||
| JP2007119678A | 2007-05-17 | |||
| JP2009258585A | 2009-11-05 | |||
| JP2008083157A | 2008-04-10 | |||
| JP2010150234A | 2010-07-08 | |||
| JP2010138330A | 2010-06-24 | |||
| JP2012013811A | 2012-01-19 |
Foreign References:
| US0004000A | 1845-04-16 |
Attorney, Agent or Firm:
Seiji Kojima
Yasuyuki Hiraiwa
Yasuyuki Hiraiwa