Title:
感放射線性組成物およびハードマスク形成材料
Document Type and Number:
Japanese Patent JP4433933
Kind Code:
B2
Inventors:
Hikaru Sugita
Masato Tanaka
Keiji Konno
Nomura Nakatsutsu
Tsutomu Shimokawa
Masato Tanaka
Keiji Konno
Nomura Nakatsutsu
Tsutomu Shimokawa
Application Number:
JP2004235695A
Publication Date:
March 17, 2010
Filing Date:
August 13, 2004
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/038; C08F220/26; C08F232/08; H01L21/027; C08L33/04
Domestic Patent References:
| JP2005015532A | ||||
| JP2002244297A | ||||
| JP2002020454A | ||||
| JP63030155A | ||||
| JP2001192539A | ||||
| JP2001027810A | ||||
| JP1099887A | ||||
| JP62246910A |
Attorney, Agent or Firm:
Toshiaki Fukuzawa