Title:
感放射線性樹脂組成物及びレジストパターン形成方法
Document Type and Number:
Japanese Patent JP6442965
Kind Code:
B2
Inventors:
Large saki
Ikui Junto
Ikui Junto
Application Number:
JP2014206770A
Publication Date:
December 26, 2018
Filing Date:
October 07, 2014
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/039; C08F22/20; C08F22/22; G03F7/038
Domestic Patent References:
| JP7181677A | ||||
| JP2003207885A | ||||
| JP2015138238A | ||||
| JP2001088446A | ||||
| JP2005298393A |
Attorney, Agent or Firm:
Hajime Amano
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Yoshiaki Negi
Kenichi Fujinaka
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Yoshiaki Negi
Kenichi Fujinaka