Title:
感放射線性樹脂組成物、レジストパターン形成方法、重合体及び化合物
Document Type and Number:
Japanese Patent JP6458455
Kind Code:
B2
Inventors:
Large saki
Ikui Junto
Ikui Junto
Application Number:
JP2014226524A
Publication Date:
January 30, 2019
Filing Date:
November 06, 2014
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/039; C08F220/26; C08F224/00; C08F246/00; G03F7/038
Domestic Patent References:
| JP2011070147A | ||||
| JP2000162772A | ||||
| JP2051509A |
Foreign References:
| WO2012043685A1 | ||||
| US20130171562 | ||||
| EP0629639A1 |
Attorney, Agent or Firm:
Hajime Amano
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Kenichi Fujinaka
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Kenichi Fujinaka