Title:
感放射線性樹脂組成物、レジストパターン形成方法、重合体、化合物及びその製造方法
Document Type and Number:
Japanese Patent JP6492515
Kind Code:
B2
Inventors:
Ikui Junto
Hiroyuki Nii
Large saki
Hiroyuki Nii
Large saki
Application Number:
JP2014209355A
Publication Date:
April 03, 2019
Filing Date:
October 10, 2014
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/039; C07C67/14; C07C69/675; C07C69/732; C07C231/12; C07C235/06; C07C253/30; C07C255/20; C07D307/20; C07D307/33; C07D307/93; C07D317/40; C07D327/04; C07D407/12; C08F224/00; G03F7/004; G03F7/038
Domestic Patent References:
| JP2014172333A | ||||
| JP2012063741A | ||||
| JP2002338627A | ||||
| JP2010204187A | ||||
| JP2013218308A |
Foreign References:
| US20120251952 |
Attorney, Agent or Firm:
Hajime Amano
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Yoshiaki Negi
Kenichi Fujinaka
Yoshinori Ikeda
Hiroshi Ogawa
Koji Ishida
Kazuki Kagami
Yoshiaki Negi
Kenichi Fujinaka