Title:
RADIATION SENSITIVE RESIN COMPOSITION FOR SLIT SPIN COAT AND ITS USAGE
Document Type and Number:
Japanese Patent JP2005284115
Kind Code:
A
Abstract:
To provide a radiation sensitive resin composition suitable for forming a resin film on a large substrate by a slit spin coat method.
The radiation sensitive resin composition for a slit spin coat containing an alkali-soluble novolac resin and a photosensitizing agent has a viscosity at 25°C of 8-14 mPa s. A pattern forming method is characterized in that a substrate is coated with the radiation sensitive resin composition for the slit spin coat by the slit spin coat method.
Inventors:
NAKAMURA KENJI
OZAWA KAKUEI
OIE MASAYUKI
OZAWA KAKUEI
OIE MASAYUKI
Application Number:
JP2004100013A
Publication Date:
October 13, 2005
Filing Date:
March 30, 2004
Export Citation:
Assignee:
NIPPON ZEON CO
International Classes:
G03F7/023; B05D1/40; G03F7/004; G03F7/16; H01L21/027; (IPC1-7): G03F7/023; B05D1/40; G03F7/004; G03F7/16; H01L21/027