Title:
感放射線性樹脂組成物
Document Type and Number:
Japanese Patent JP5660037
Kind Code:
B2
Abstract:
A radiation-sensitive resin composition includes an acid-dissociable group-containing resin, and a compound shown by the following general formula (1). wherein Z− represents a monovalent anion shown by a general formula (2), M+ represents a monovalent onium cation, R1 represents a linear or branched alkyl group having 1 to 12 carbon atoms substituted or unsubstantiated with a fluorine atom, or a linear or branched alkoxy group having 1 to 12 carbon atoms, and n is 1 or 2.
Inventors:
丸山 研
西野 晃太
笠原 一樹
榊原 宏和
西野 晃太
笠原 一樹
榊原 宏和
Application Number:
JP2011514394A
Publication Date:
January 28, 2015
Filing Date:
May 14, 2010
Export Citation:
Assignee:
ＪＳＲ株式会社
International Classes:
G03F7/039; C07C65/05; C07C65/10; C08F212/06; C08F220/18; C08F220/36; G03F7/004
Domestic Patent References:
| JPS62195324A | 1987-08-28 | |||
| JPH05181279A | 1993-07-23 | |||
| JPH11125907A | 1999-05-11 | |||
| JP2005274647A | 2005-10-06 | |||
| JPS62195324A | 1987-08-28 | |||
| JPH05181279A | 1993-07-23 | |||
| JPH11125907A | 1999-05-11 | |||
| JP2005274647A | 2005-10-06 |
Other References:
JPN6014020279; Ｒｉｘｔ Ｔ． Ｂｕｗａｌｄａ: 'Ｗｏｒｍｌｉｋｅ Ｍｉｃｅｌｌａｒ ａｎｄ Ｖｅｓｉｃｕｌａｒ Ｐｈａｓｅｓ ｉｎ Ａｑｕｅｏｕｓ Ｓｏｌｕｔｉｏｎｓ ｏｆ Ｓｉｎｇｌｅ-Ｔａｉｌｅｄ Ｓｕｒｆａｃｔａｎｔｓ ｗｉｔｈ Ａｒｏｍａｔ' Ｌａｎｇｍｕｉｒ ２０００，１６, 20000601, ｐ６７８０-６７８６
Attorney, Agent or Firm:
Ippei Watanabe
Koji Kikawa
Hiroyuki Sato
Shigeru Koike
Koji Kikawa
Hiroyuki Sato
Shigeru Koike