Title:
感放射線性樹脂組成物及び化合物
Document Type and Number:
Japanese Patent JP5708663
Kind Code:
B2
Abstract:
A radiation-sensitive resin composition includes a compound represented by a formula (1), and a polymer that includes a structural unit having an acid-labile group. R1 and R4 each independently represent a hydrogen atom, or the like. R2 and R3 each independently represent a hydrogen atom or the like. X1 and X2 each independently represent a hydrogen atom, or the like, or X1 and X2 taken together represent —S—, —O—, —SO2—, or the like. A represents an ethanediyl group, wherein at least one hydrogen atom included in X1, X2 and A is substituted by —Y—SO3−M+. Y represents an alkanediyl group having 1 to 10 carbon atoms, or the like. M+ represents a monovalent onium cation. In the case where —Y—SO3−M+ is present in a plurality of number, a plurality of Ys are each identical or different and a plurality of M+s are each identical or different.
Inventors:
Kazuo Nakahara
Maruyama Lab
Maruyama Lab
Application Number:
JP2012550948A
Publication Date:
April 30, 2015
Filing Date:
December 26, 2011
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/004; C07C22/02; C07C309/19; C07C313/04; C07C381/12; C07D307/00; G03F7/039
Domestic Patent References:
| JP2004317907A | 2004-11-11 | |||
| JP2005126598A | 2005-05-19 | |||
| JP2002255877A | 2002-09-11 | |||
| JPS51112865A | 1976-10-05 | |||
| JP2004317907A | 2004-11-11 |
Foreign References:
| WO2005101129A1 | 2005-10-27 | |||
| WO2005101129A1 | 2005-10-27 |
Attorney, Agent or Firm:
Hajime Amano