Title:
感放射線性樹脂組成物、層間絶縁膜およびマイクロレンズ、ならびにそれらの製造方法
Document Type and Number:
Japanese Patent JP4315013
Kind Code:
B2
Abstract:
Disclosed is a radiation-sensitive composition that contains [A]: a copolymer of (a1) an unsaturated carboxylic acid and/or an unsaturated carboxylic acid anhydride, (a2) an epoxy-containing unsaturated compound, (a3) an unsaturated compound having at least one skeleton selected from the group consisting of a tetrahydrofuran skeleton, a furan skeleton, a tetrahydropyran skeleton, a pyran skeleton and the skeletons represented by formula (1), [where R is hydrogen or methyl, and n is an integer between 2-10], and (a4) an unsaturated compound other than the compounds of (a1), (a2) and (a3), and [B] a 1,2-naphthoquinonediazido compound, and an interlayer insulation film and a micro-lens manufactured from the composition. The radiation-sensitive composition has high radiation sensitivity and a sufficient margin for development and is capable of easily forming a patterned thin film excellent in adhesion.
Inventors:
Eiji Takamoto
Kenichi Hamada
Takaki Minowa
Kimiyasu Sano
Nishikawa General Rules
Kenichi Hamada
Takaki Minowa
Kimiyasu Sano
Nishikawa General Rules
Application Number:
JP2004045724A
Publication Date:
August 19, 2009
Filing Date:
February 23, 2004
Export Citation:
Assignee:
JSR CORPORATION
International Classes:
G03F7/023; C08F220/04; G03F7/038; C08F222/04; G02B1/04; G03F7/022; G03F7/04; H01L21/027
Domestic Patent References:
| JP6348017A | ||||
| JP2000250208A | ||||
| JP2002040644A | ||||
| JP2004264623A |