Title:
急速熱処理装置及び方法
Document Type and Number:
Japanese Patent JP4275729
Kind Code:
B2
Abstract:
An apparatus and method for rapidly and uniformly heating a workpiece includes a plurality of walls defining a first chamber, a first source of radiation for producing incident radiation on a first energy transfer surface of the workpiece, a holder for holding the workpiece in a workpiece plane in the chamber and a radiation absorbing surface on at least one wall of the chamber. The holder has an energy transfer surface, the energy transfer surfaces of the holder and of the workpiece reflecting and emitting radiation in the chamber and the radiation absorbing surface particularly for absorbing radiation reflected and radiation emitted from the energy transfer surfaces.
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Inventors:
Cam, david malcolm
Application Number:
JP50838196A
Publication Date:
June 10, 2009
Filing Date:
August 28, 1995
Export Citation:
Assignee:
Vortech Industries Limited
International Classes:
H01L21/26; C23C16/48; F27B17/00; H01L21/00
Domestic Patent References:
| JP697154A |
Attorney, Agent or Firm:
Masao Miyake