Title:
希土類窒化物構造体およびデバイスならびに不動態化キャッピングを除去するための方法
Document Type and Number:
Japanese Patent JP7131835
Kind Code:
B2
Abstract:
The present invention concerns a structure or device comprising a rare earth nitride material, and a removable capping for passivating the rare earth nitride material.
Inventors:
Frank Natali
Benjamin John Luck
Harry Joseph Trodar
Jay Ross Pen Chung Chan
Benjamin John Luck
Harry Joseph Trodar
Jay Ross Pen Chung Chan
Application Number:
JP2019530428A
Publication Date:
September 06, 2022
Filing Date:
December 07, 2017
Export Citation:
Assignee:
Victoria Link Limited
International Classes:
H01L29/20; H01F10/193; H01L21/20; H01L29/06; H01L29/15
Domestic Patent References:
| JP2011061204A | ||||
| JP2017513231A | ||||
| JP2017511294A |
Foreign References:
| WO2015152736A2 | ||||
| WO2015152737A2 |
Attorney, Agent or Firm:
Junji Yuda
Noriyuki Takebayashi
Noriyuki Takebayashi