Title:
RATED LIQUID DISCHARGE DEVICE AND SPECIFIC RATIO MIXING EQUIPMENT OF MIXED LIQUID
Document Type and Number:
Japanese Patent JP3205024
Kind Code:
B2
Abstract:
PURPOSE: To enable producing precisely mixable liquid at a specific ratio by a method, wherein a level of a liquid fed to a Teflon (registered trademark) vessel is sensitized, so as to discharge a specific amount of liquid into this vessel for automatically feeding a specific liquid into this Teflon vessel.
CONSTITUTION: This rated liquid discharge device is provided with a liquid level sensor which senses three levels of A, B, C, i.e., a Teflon vessel 1' and hydrofluoric acid (HF) fed into the Teflon vessel 1' as well as a rated liquid discharge device feeding HF in the precise amount of 100 cc to a mixing tank 17' and an automatic liquid feeder automatically feeding HF in a 5 gallon chemical tank 2' into the Teflon vessel 1'. At this time, the amount of HF is precisely measured by an inner vessel 1a, using the dual structured Teflon vessel 1'. After discharging HF into a chemical vessel 17', precise amount of deionized water is mixed in the chemical vessel 17' using an electronic balance 20. Through these procedures, a mixed solution in a precise ratio can be produced automatically.
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Inventors:
Do Hyun Ryu
Choi Yuan
Choi Yuan
Application Number:
JP632892A
Publication Date:
September 04, 2001
Filing Date:
January 17, 1992
Export Citation:
Assignee:
EL G SEMICON Company Limited
International Classes:
H01L21/304; B01F15/02; B01F15/04; B01J4/02; G01F11/28; G01G17/02; G01G19/22; G05D11/13; H01L21/027; H01L21/306; H01L21/66; (IPC1-7): H01L21/306; B01J4/02
Domestic Patent References:
| JP61171138A | ||||
| JP63272040A | ||||
| JP5040983A |
Attorney, Agent or Firm:
Hisami Fukami (4 outside)