Title:
原料液供給ユニット
Document Type and Number:
Japanese Patent JP5046423
Kind Code:
B2
Inventors:
Katohisashi Kato
Yoshiyuki Okabe
Kazutoshi Ito
Takashi Yajima
Hiroki Doi
Yoshiyuki Okabe
Kazutoshi Ito
Takashi Yajima
Hiroki Doi
Application Number:
JP2008142639A
Publication Date:
October 10, 2012
Filing Date:
May 30, 2008
Export Citation:
Assignee:
東京エレクトロン株式会社
CKD株式会社
CKD株式会社
International Classes:
H01L21/31; C23C16/448
Domestic Patent References:
| JP2002095955A | ||||
| JP2004134735A | ||||
| JP2000246078A | ||||
| JP2003234292A | ||||
| JP2008004837A |
Attorney, Agent or Firm:
Patent Business Corporation Cosmos Patent Office