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Patent Searching and Data


Title:
REACTION TREATMENT APPARATUS
Document Type and Number:
Japanese Patent JPH04162713
Kind Code:
A
Abstract:

PURPOSE: To prevent mixing of an explosive-combustive gas by providing a reaction chamber into which a plurality of gases are introduced, a plurality of exhaust systems for exhausting the reaction chamber, and a means of selecting the different exhaust systems according to the kind of the gas introduced into the reaction chamber.

CONSTITUTION: A reaction chamber 1 into which a plurality of gases are introduced, a plurality of exhaust systems/3A and 3B for exhausting the reaction chamber 1, and means 3AV and 3BV of selecting the different exhaust systems 3A and 3B according to the kind of the gas introduced into the reaction chamber 1, are provided. In other words, the exhaust systems 3A and 3B for a reducing gas A and an oxidizing gas B are provided separately for the reaction chamber 1 and they are switched over according to the kind of the gas introduced into the reaction chamber 1. Therefore, separation of the two gases is conducted spatially herein, while it is conducted on a time basis in conventional examples. According to this constitution, mixing of an explosive- combustive gas can be prevented.


Inventors:
FURUMURA YUJI
UOOCHI YASUO
MIENO FUMITAKE
OBA TAKAYUKI
TOKI MASAHIKO
Application Number:
JP28916690A
Publication Date:
June 08, 1992
Filing Date:
October 26, 1990
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L21/285; H01L21/205; H01L21/22; H01L21/223; (IPC1-7): H01L21/205; H01L21/223; H01L21/285
Domestic Patent References:
JPS6220875A1987-01-29
JPH04113621A1992-04-15
Attorney, Agent or Firm:
Sadaichi Igita