Title:
加熱素子の破損を早期に認識するマルチゾーン縦型炉のリアルタイム監視
Document Type and Number:
Japanese Patent JP7271520
Kind Code:
B2
Abstract:
Real-time monitoring of a multi-zone vertical furnace with early detection of a failure of a heating zone element is disclosed. For example, a continuously provided measurement of a resistance value (R1) of a resistance (1) in at least one heating zone (1′) of several heating zones (1′, 2′, 3′, 4′, 5′) takes place in the thermal device (100), each currently measured value (R1(i)) of the resistance (1) in the related heating zone (1′) is compared with a previously measured value (R1(i−1)) of the same resistance (1), and a warning or an alarm (90) for the thermal device (100) is generated when a deviation (310, ΔR1) is detected by a comparison of the two resistance values from the same heating zone (1′) before a failure of a complete heating zone (1) in the thermal device (100) takes place.
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Inventors:
Gruber Sven
Application Number:
JP2020517118A
Publication Date:
May 11, 2023
Filing Date:
September 25, 2018
Export Citation:
Assignee:
X-FAB Semiconductor Foundries GmbH
International Classes:
H01L21/22; F27D21/00; H01L21/324; H05B3/00
Domestic Patent References:
| JP2013206618A | ||||
| JP2009281837A | ||||
| JP2006085907A | ||||
| JP2006165200A | ||||
| JP2014502037A | ||||
| JP2013008677A |
Foreign References:
| WO2012165174A1 |
Attorney, Agent or Firm:
Patent Attorney Corporation Sakamoto International Patent and Trademark Office
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