Title:
RECTANGULAR PARALLELEPIPED FLUID STORAGE AND DISPENSING VESSEL
Document Type and Number:
Japanese Patent JP2013257041
Kind Code:
A
Abstract:
To downsize a device for storing and supplying many kinds of semiconductor gases at low pressure.
A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in a vented gas cabinet are disclosed. By the use of physical adsorbent and chemical sorbent medium, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
Inventors:
BRESTOVANSKY DENNIS
WODJENSKI MICHAEL J
ARNO JOSE I
CARRUTHERS J DONALD
MOROCO PHILIP A
WODJENSKI MICHAEL J
ARNO JOSE I
CARRUTHERS J DONALD
MOROCO PHILIP A
Application Number:
JP2013133328A
Publication Date:
December 26, 2013
Filing Date:
June 26, 2013
Export Citation:
Assignee:
ADVANCED TECH MATERIALS
International Classes:
F17C11/00; B01D53/02; B01D53/04; B01D59/26; B01J4/02; B67D7/74; B67D99/00; F17C13/02; B01D
Foreign References:
| US6406519B1 | 2002-06-18 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki