Title:
RECTANGULAR PARALLELEPIPED FLUID STORAGE AND QUANTITATIVE DISPENSING CONTAINER
Document Type and Number:
Japanese Patent JP2008045750
Kind Code:
A
Abstract:
To miniaturize a device for storing and supplying various kinds of semiconductor gas at low pressures.
A fluid storage and dispensing device includes a fluid storage and quantitative dispensing container of rectangular parallelepiped shape, and an integrated gas cabinet assembly includes such a fluid storage and dispensing device and/or a point-of-use ventilation gas purifier in a vented gas cabinet. By the use of physical adsorbent and chemical adsorbent media, the gas cabinet can be enhanced in safety of operation when process gas supplied from the gas cabinet is of a toxic or hazardous property, for instance.
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Inventors:
BRESTOVANSKY DENNIS
WODJENSKI MICHAEL J
ARNO JOSE I
CARRUTHERS J DONALD
MOROCO PHILIP A
WODJENSKI MICHAEL J
ARNO JOSE I
CARRUTHERS J DONALD
MOROCO PHILIP A
Application Number:
JP2007210120A
Publication Date:
February 28, 2008
Filing Date:
August 10, 2007
Export Citation:
Assignee:
ADVANCED TECH MATERIALS
International Classes:
F17C11/00; B01D53/02; B01D53/04; B01D59/26; B01J20/28; B67D7/74; B67D99/00; B01D
Domestic Patent References:
| JP2000205496A | 2000-07-25 | |||
| JPH09242995A | 1997-09-16 | |||
| JP2000028098A | 2000-01-25 | |||
| JPH11511233A | 1999-09-28 | |||
| JP2002156097A | 2002-05-31 | |||
| JPH0266399A | 1990-03-06 | |||
| JP2002158021A | 2002-05-31 |
Foreign References:
| US6406519B1 | 2002-06-18 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Shinji Oga
Toshifumi Onuki
Shinji Oga
Toshifumi Onuki
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