Title:
再生クーラント、及びクーラント再生方法
Document Type and Number:
Japanese Patent JP5740255
Kind Code:
B2
Inventors:
Bono Shigeki
Nishida High Osamu
Dai Ogita
Koji Yamada
Takeo Nishi
Nishida High Osamu
Dai Ogita
Koji Yamada
Takeo Nishi
Application Number:
JP2011194821A
Publication Date:
June 24, 2015
Filing Date:
September 07, 2011
Export Citation:
Assignee:
G-Force Japan Co., Ltd.
KURARAY CO.,LTD.
KURARAY CO.,LTD.
International Classes:
B24B57/00; B28D7/02; H01L21/304
Domestic Patent References:
| JP2010253622A | ||||
| JP2010064197A |
Attorney, Agent or Firm:
Kanji Maeda
Oya Masayo
Oya Masayo
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